JPS633085Y2 - - Google Patents

Info

Publication number
JPS633085Y2
JPS633085Y2 JP2258983U JP2258983U JPS633085Y2 JP S633085 Y2 JPS633085 Y2 JP S633085Y2 JP 2258983 U JP2258983 U JP 2258983U JP 2258983 U JP2258983 U JP 2258983U JP S633085 Y2 JPS633085 Y2 JP S633085Y2
Authority
JP
Japan
Prior art keywords
opening
plate
ion source
ring
aperture plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2258983U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59129161U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2258983U priority Critical patent/JPS59129161U/ja
Publication of JPS59129161U publication Critical patent/JPS59129161U/ja
Application granted granted Critical
Publication of JPS633085Y2 publication Critical patent/JPS633085Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP2258983U 1983-02-18 1983-02-18 アパ−チヤ板の交換機構 Granted JPS59129161U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2258983U JPS59129161U (ja) 1983-02-18 1983-02-18 アパ−チヤ板の交換機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2258983U JPS59129161U (ja) 1983-02-18 1983-02-18 アパ−チヤ板の交換機構

Publications (2)

Publication Number Publication Date
JPS59129161U JPS59129161U (ja) 1984-08-30
JPS633085Y2 true JPS633085Y2 (en]) 1988-01-26

Family

ID=30153682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2258983U Granted JPS59129161U (ja) 1983-02-18 1983-02-18 アパ−チヤ板の交換機構

Country Status (1)

Country Link
JP (1) JPS59129161U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107851550B (zh) * 2015-07-13 2019-06-28 株式会社岛津制作所 闸门

Also Published As

Publication number Publication date
JPS59129161U (ja) 1984-08-30

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